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Design for a Millimeter-Scale Walking Robot
May 2000
David A. Routenberg, The MITRE Corporation
James C. Ellenbogen, The MITRE Corporation
ABSTRACT
A design is presented for a millimeter-scale walking robot. The five-millimeter-long robot would be
fabricated using micro-lithographic techniques. The design specifies six identical legs, each of which is a
discrete microelectromechanical system (MEMS), and for which detailed design drawings already have been
developed. Each of the legs incorporates and integrates only motors and drive mechanisms that previously
have been fabricated and demonstrated elsewhere, in other types of MEMS devices.
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